Continuous Lab Inline Sputter Coating Machine

This is a small pilot sputtering machine which is designed for testing or coatings engineering by small scale. It comes with DC sputtering or Mid-frequency(MF) magnetron sputtering guns, with or without ion plasma cleaning system. You could choose planar or rotary cylindrical sputtering cathodes for your application. Both of horizontal and vertical vacuum chambers are available.

It allows you to apply different coatings in multiple layers onto substrates. It can be equipped with diffusion pump or oil-free turbo molecular pumps. It is capable to apply AR coatings, ITO glass, mirrors, or for solar cells.