13.56MHz RF Plasma Power Source
Features:
Entry (input cable) has APFC modules to improve the input side power factor;
Use full digital control, high stability and high reliability;
High brightness LCD display, intuitive operation;
Perfect protection functions: overvoltage, overcurrent, over -temperature protection;
With continuous and pulse output mode;
Communication interface: default RS485, optional Ethercat, Ethernet, and CAN communication interface;
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RLS330A-3K0/13-S2/4B*** |
3000W |
482.6×550.5×132.5 |
25kg |
Water cooling |
Technical parameters
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Input |
AC input voltage |
220VAC±10% |
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frequency |
50Hz |
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Power factor |
≥0.98（100%RL） |
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Output |
Rating output power |
3000W |
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Output frequency |
13.56MHz±0.005%（25°C） |
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Output impedance |
50Ω+j0 |
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efficiency |
＞75%，Z=50Ω，FWD=额定 |
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harmonic |
＜-45dB |
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Bruise |
＜-50dB |
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Pulse frequency |
100Hz~10KHz |
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Pulse duty cycle |
10%~90% |
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Output power stability |
＜300W±1% ＞300W±0.5% |
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Export power adjustment range |
1%~ 100%rated power |
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Power of glow |
10%~ 20%rated power (recommended) |
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Output power leakage |
<1W, RF-ON set power = 0w ＜0.5W， RF-OFF |
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Protection functions |
DC overvoltage |
DC voltage exceeds the set value protection, stopped |
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DC over current |
DC current exceeds the set value protection, stopped |
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DC overheating |
More than the setting alarm value protection, shutdown |
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Portal over pressure |
The peak of the amplifier exceeds the set value protection, the stop |
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Overheat |
More than the setting alarm value protection, shutdown |
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External lock |
The external interconnection connector is not connected, the unit is stopped |
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Inverse power overrun |
The reflex power exceeds the set threshold protection limit output power |
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Operation environment |
Altitude |
Use more than 2000 meters to reduce it at the standard |
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Operating temperature |
0 ～ + 40 ℃ |
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humidity |
Humidity: 15 % ~ 85 % (no knot dew) |
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Ventilation conditions |
good ventilate |
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Cooling water temperature |
Temperature 20 ℃ ～ 30 ℃ |
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Cooling water quality |
Pure water or ion water |
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Water flow and pressure |
Flow ≥5L/min, pressure ≤ 0.5MPa, pressure difference ≥0.1 mPa |