30kw Plasma Power Supply for Vacuum Thin Fim Deposition
| Input parameters | |
| Supply voltage | 3×200V±10% |
| 3×380V±10% | |
| Power frequency | 50Hz/60Hz |
| Output parameters | |
| Output power: | 10KW~200KW |
| Output frequency: | DC |
| Output voltage: | 800V~1200V |
| Output current: | 20A~500A |
| Current stabilization accuracy: | 1% |
| Cooling mode: | Water cooling+air cooling |
| Arc extinguishing time: | 3ms~100ms |
| Operating mode: | Constant current, constant power |