5kW / 10kW / 15kW DC Power Supply for Magnetron Sputter Deposition

Product Overview

DC Power Supply is a high-performance power solution designed for precision industrial applications, supporting power ratings of 5kW, 10kW, and 15kW. Equipped with advanced PFC+SiC full-bridge structure and DSP+FPGA digital control technology, it delivers exceptional stability, accuracy, and reliability, making it ideal for sputtering equipment, vacuum coating systems, and other high-end industrial devices that demand precise power control.
 

Key Features

  1. High-Efficiency & Stable Performance
     
    Adopts a PFC+SiC full-bridge structure combined with DSP+FPGA digital control technology, ensuring ultra-high efficiency (up to ≥90% at rated output) and stable power output, perfectly meeting the strict power supply requirements of precision metal processing and thin-film coating industries.
     
  2. Fast Response & Arc Protection
     
    Features an ultra-fast response time of ≤25μs for constant current/constant power mode switching, and an arc detection speed of ≤0.1μs. Built-in arc elimination technology effectively prevents arc and sheet breakage, safeguarding equipment and improving production yield.
     
  3. Flexible Output & Versatile Monitoring
     
    Supports stepless adjustment of output voltage/Current (0~100% of rated value) with a 0.1% resolution, and a maximum output current of up to 2000A. Equipped with a 3.1-inch OLED display, it enables real-time monitoring of voltage, current, power, and other key parameters, while supporting 16-bit high-precision digital display for clear data reading.
     
  4. Comprehensive Communication & Compatibility
     
    Comes with standard analog signal ports (0-10V/4-20mA) and multiple communication interfaces including RS-485, Modbus-RTU, DB9, Profibus-DP, and EtherCAT/IP, ensuring seamless integration with industrial control systems and remote monitoring capabilities.

Technical Specifications

Parameter Category Model 5kW 10kW 15kW
Power Rating - 5kW 10kW 15kW
Input Parameters Voltage & Frequency 3×380Vac ±10% / 50-60Hz 3×380Vac ±10% / 50-60Hz 3×380Vac ±10% / 50-60Hz
  Output Current Max 12.5A 25A 30A
  Output Voltage Range 400V / 600V 400V / 600V 400V / 600V
  Ignition Voltage Max ≤1000V ≤1000V ≤1000V
  Arc Detection Time ≤0.1μs ≤0.1μs ≤0.1μs
Output Parameters Max Output Power 20000A/μs 20000A/μs 20000A/μs
  Display Resolution 16-bit high precision 16-bit high precision 16-bit high precision
  Output Accuracy 0.1% (set value) 0.1% (set value) 0.1% (set value)
  Efficiency ≥90% (rated output) ≥90% (rated output) ≥90% (rated output)
Communication & Interface Analog Interface DB25 0-10VDC DB25 0-10VDC DB25 0-10VDC
  Communication Ports RS-485/Modbus-RTU/DB9/Profibus-DP/EtherCAT/IP RS-485/Modbus-RTU/DB9/Profibus-DP/EtherCAT/IP RS-485/Modbus-RTU/DB9/Profibus-DP/EtherCAT/IP
  I/O Interface 4×dry contact / 2×10A/30A relay 4×dry contact / 2×10A/30A relay 4×dry contact / 2×10A/30A relay
  Communication Cable ZY/TJCDL-10mm² ZY/TJCDL-10mm² ZY/TJCDL-10mm²
Physical & Environmental Mounting Style M6 hexagon socket M6 hexagon socket M6 hexagon socket
  Dimensions 440×480×178mm 440×480×178mm 440×480×178mm
  Net Weight ≈33kg ≈33kg ≈33kg
  Cooling Method Air cooling Air cooling Air cooling
  Operating Altitude ≤2000m ≤2000m ≤2000m
  Operating Temperature 5℃~45℃ 5℃~45℃ 5℃~45℃
 
 
Applications
 
Widely used in the precision processing of various metal materials (Ti, Cr, Cu, Al, In, Ni, Ag, Au), as well as supporting sputtering equipment, vacuum coating machines, and other industrial automation systems that require high-precision DC power supply.