The FF-200/1300F Turbo Molecular Pump is a premium grease-lubricated high-vacuum pump engineered for demanding industrial and research applications. With a pumping speed of 1300 L/s for nitrogen (N₂) and an ultimate pressure reaching 6×10⁻⁷Pa (CF flange), this pump delivers exceptional vacuum performance in a compact, space-saving design.
Whether you need reliable vacuum for thin-film deposition, solar cell manufacturing, or ultra-high vacuum research, the FF-200/1300F offers the perfect balance of high throughput, operational stability, and low total cost of ownership.
| Feature | Benefit |
|---|---|
| Grease-lubricated ceramic bearings | Oil-free operation — no hydrocarbon contamination, ideal for clean processes; maintenance-free for 3–5 years-7-19 |
| High pumping speed (1300 L/s for N₂) | Faster cycle times and higher throughput in production environments-1 |
| High fore-vacuum tolerance (240 Pa continuous) | Works reliably with smaller backing pumps; flexible system design-1 |
| High compression ratio (10⁹ for N₂ / Ar) | Excellent gas handling — prevents back-streaming into your vacuum chamber-1 |
| Compact, any-angle installation | Easy system integration — fits even in space-constrained equipment-1 |
| ≤500 W low power consumption | Energy-efficient operation — lower electricity costs |
Technical Specifications:
| Air Inlet flange | DN200 CF DN200 ISO-K |
| Exhaust Port Flange (ISO-KF) | DN40 |
| Pumping rate (L/s) | N2：1300 He：1000 H2：480 Ar：1250 |
| Compression ratio | N2：1E9 He：1E4 H2：6E3 Ar：1E9 |
| Ultimate pressure (Pa) | CF：6E-7 ISO-K：6E-6 |
| Maximum continuous front pressure (Pa) | 240 |
| Maximum front pressure (Pa) | N2：600 |
| Maximum Air Load (sccm) | N2：2500 He：1850 H2：1450 Ar：950 |
| Rated speed (RPM) | 24000 |
| Startup time (min) | ≤9 |
| Cooling mode | Water Cooling or air cooling |
| Cooling water flow (L/min) | ≥1 |
| Cooling water temperature (°C) | ≤25 |
| Power supply voltage (V AC) | DC24/AC220 |
| Maximum power (W) | ≤500 |
| Adaptable Power Supply Model | TCDP-II、FD-IIB、TD-II/TCP-II |
| Recommended Front Pump (L/s) | 15 |
| Weight (kg) | 33(LF) 35(CF) |
What Makes the FF-200/1300F Different?
1. Grease-Lubricated Ceramic Bearings — Truly Oil-Free
Unlike oil-lubricated pumps that risk hydrocarbon contamination and require frequent oil changes, the FF-200/1300F uses self-sealed ceramic bearings with premium grease lubrication. This design provides 3–5 years of maintenance-free operation under normal conditions, dramatically reducing downtime and operating costs.
2. Compound Rotor Design — High Throughput Even at Higher Fore-Vacuum Pressures
The innovative compound rotor combines turbomolecular and drag stages, maintaining excellent pumping speed even when operating with a smaller backing pump. This translates to simpler system architecture and lower upfront investment.
3. Compact Structure + Any-Angle Installation
The FF-200/1300F can be installed vertically, horizontally, or at any angle, giving system designers complete freedom. Its compact footprint integrates easily into existing equipment with minimal space penalty.
4. Dual Cooling Options — Water or Air
Standard water cooling (≥1 L/min, ≤25°C) ensures stable operation in high-duty-cycle applications, while optional air cooling provides flexibility for less demanding environments.
Applications:
FF-200/1300F is trusted in high-value industrial processes and research applications including:
| Industry | Specific Applications |
|---|---|
| Solar Cells | Thin-film deposition and PV manufacturing |
| Glass Coatings | Low-E glass, ITO glass, optical coatings |
| Thin-Film Deposition | PVD, CVD, sputtering systems |
| Decorative Coatings | Watch cases, hardware, automotive trim |
| Flat Panel Displays | OLED and LCD manufacturing |
| Vacuum Furnaces | Heat treatment, brazing, sintering |
| Research & Development | Surface science, materials research, accelerators |
| Electron Devices | Cathode ray tubes, vacuum interrupters |
| New Energy / New Materials | Battery materials, advanced composites |
| Vacuum Drying & Cryogenics | Pharmaceutical and food processing |
✦ Get a Quote
Contact our sales team today for pricing, lead times, and technical consultation.
Need a complete vacuum system? We can also supply backing pumps, vacuum gauges, valves, and full pumping stations.