Graphite arc targets (also known as carbon sputtering targets or graphite rotary targets) are high-performance source materials used in physical vapor deposition (PVD) processes, particularly in arc evaporation and magnetron sputtering systems. Manufactured from high-purity carbon graphite, these targets produce thin films with exceptional electrical, thermal, and mechanical properties, making them indispensable across semiconductor, optical, automotive, and industrial coating applications.

Our graphite arc targets are engineered to deliver superior coating performance, whether used for diamond-like carbon (DLC) coatings, decorative black films, or functional protective layers.

Features & Specifications

High Purity

Available in purity grades from 99% (2N) up to 99.999% (5N), our graphite targets ensure minimal impurity content for optimal film quality and consistency. Ultra-high purity (99.999%) targets are particularly suited for sensitive applications such as semiconductor manufacturing and energy storage devices.

Target Forms

Available in multiple configurations to suit various deposition systems:

  • Rotary (Rotatable) Targets: Cylindrical targets that rotate around a fixed axis during the coating process, offering high material utilization rates (over 70%) and uniform film deposition.

  • Planar Targets: Flat targets available in rectangular, circular, and custom shapes.

  • Bonded or Unbonded: Optional backing plates can be added for improved durability and mounting compatibility.

Applications

Our graphite arc targets are widely used in:

  • Semiconductor Industry: For electrode materials, interconnects, insulating layers, and heat dissipation layers in chip manufacturing.

  • Optical Coatings: Production of anti-reflective films, transmittance enhancement films, and filters for high-end optical lenses and instruments.

  • Mechanical & Tribological Coatings: DLC coatings for cutting tools, milling cutters, drills, hobbing cutters, stamping dies, and automotive engine parts, significantly improving hardness, wear resistance, and service life.

  • Decorative Coatings: Production of bright black film layers with enhanced light absorption, blackness, gloss, and durability.

  • Energy Storage: Anode materials in lithium-ion batteries and supercapacitors.

  • Solar & Fuel Cell Applications: Large-area coatings for renewable energy devices.

We understand that every deposition system has unique requirements. That is why we offer fully customizable graphite arc targets to match your specific application needs.

Available Customization Options:

  • Dimensions: Custom diameters, lengths, thicknesses, and configurations available to fit any sputtering or arc deposition system.

  • Rotary Target Sizes: Cylindrical targets can be produced in lengths up to 1,000 mm or more for large-area coating applications.

  • Planar Target Configurations: Available in circular, rectangular, annular, oval, and other custom shapes.

  • Tolerances & Machining: Precision machining with tight tolerances, including hole drilling, threading, beveling, and grooving.

  • Purity Grades: Select from 99% to 99.999% purity based on your application requirements.

Our technical team works closely with customers to develop custom solutions, from material selection to final dimensions, ensuring seamless integration with your existing equipment.

Contact Us

For standard products or custom-sized graphite arc targets, please contact our sales team with your specifications. We are committed to providing high-quality materials and personalized service to support your thin-film deposition needs.