KYKY FF-400/5000 High Capacity Compound Turbo Molecular Vacuum Pump
 
KYKY FF-400/5000 Oil-Lubricated Large Flow Turbo Pump | 5000 L/s High Vacuum Pump For PVD, CVD & Industrial Vacuum Coating. 
KYKY FF-400/5000 is a heavy-duty, large-capacity oil-lubricated compound turbomolecular pump independently developed by KYKY Technology (CAS-backed). Boasting a maximum pumping speed of 5000 L/s for air, ultra-low ultimate vacuum, robust ceramic bearing structure, stable low-vibration operation and excellent gas compression ratio, it is the ideal high-vacuum core pump for large-scale industrial vacuum systems, thin-film deposition, semiconductor manufacturing and vacuum metallurgy. With mature mass-production technology, long service life and cost-effective performance, it perfectly replaces imported large-flow turbo pumps in global vacuum engineering.KYKY
 
Main Specifications:
 
Key Features & Advantages 
  • Ultra-high Pumping Capacity: Rated air pumping speed up to 5000 L/s, fast large-volume gas evacuation for heavy-load vacuum chambers
  • Premium Ceramic Bearing System: High-temperature resistant, wear-resistant ceramic bearings ensure ultra-long continuous operation and low failure rate
  • Oil Lubrication Structure: Stable lubrication, strong anti-shock performance, wide backing pressure tolerance, suitable for continuous industrial productionKYKY
  • Compact Integrated Design: Optimized integral turbine rotor, low vibration, low noise, compact overall size, flexible pipeline installation
  • Ultimate High Vacuum Performance: Achieves extreme high vacuum level, excellent compression ratio for light molecules (H₂, He, N₂)
  • Fast Startup & Stable Operation: Short acceleration time, reliable steady-speed running, low power consumption and high energy efficiency
  • Broad Environmental Adaptability: Compatible with mainstream dry backing pumps, adaptable to PVD/CVD corrosive atmosphere working conditions
  • Genuine KYKY Original Manufacture: 60+ years CAS vacuum technology accumulation, global after-sales support, complete set supply (pump + controller + cables)
Industrial Applications
 
Widely applied in global vacuum industrial fields:
  • PVD Physical Vapor Deposition, CVD Chemical Vapor Deposition
  • Optical thin film coating, Low-E glass & ITO transparent film production
  • Semiconductor equipment, ion implantation, electronic component vacuum packaging
  • Industrial leak detection, helium mass spectrometer leak testing systems
  • Solar cell manufacturing, vacuum metallurgy & vacuum furnace equipment
  • Electron beam welding, aerospace vacuum simulation equipment
  • Scientific research large vacuum chambers, material high-vacuum treatment