AR anti-reflective magnetron sputtering coating machine is a kind of sophisticated vacuum coating equipment used to deposit anti-reflective coating (AR Coating) on the surface of various optical elements. It combines the advanced physical vapor deposition (PVD) technology of magnetron sputtering with the precise design of optical thin films, and is the mainstream production equipment to achieve high performance and high durability antireflective films. AR anti-reflection magnetron sputtering coating machine represents one of the highest standards in the modern optical coating industry. It is an important equipment to promote the development of consumer electronics, display technology and optical instruments by preparing anti-reflection films with excellent performance and durability for various high-end products through a highly automated and precisely controlled physical vapor deposition process.
Process Flow (Taking Multi-layer AR Coating as an Example)
Pre-cleaning: The substrate must be rigorously cleaned and dried before entering the chamber to ensure that the surface is free of contaminants.
Loading: The substrate is loaded onto the planetary carrier.
Vacuum pumping: The chamber is evacuated to a high vacuum.
Preheating/Bakeout: The substrate is heated to remove trace gases and water molecules adsorbed on the surface.
Plasma Cleaning: Argon gas is introduced to generate plasma that bombards the substrate surface for the final in-situ cleaning step, activating the surface.
Deposition: The program sequentially activates different targets and reactive gases in a pre-set sequence, alternately depositing high and low refractive index materials (such as SiO₂ and Nb₂O₅) to form the desired multilayer film structure.
Cooling and Removal: After coating is completed, the substrate is cooled to a certain temperature under vacuum or nitrogen protection, and then the vacuum is broken and the finished product is removed.
Main Applications of AR glass:
Electronic Displays
LED Lighting
Touch Screens
Front Panel Displays
Cover Screens
Heater Panels
Medical instrumentation
instrumentation WindowsProjection Monitors
Computer Screens
Lighting
Telecommunications
Ruggedized DisplaysArchitectural Windows
Display Cases
Digital AdvertisingStorefronts
Projection Port Windows
Sight Glass