Compact DC Sputtering System with Planetary Rotation | Uniform Film Deposition

Compact DC Sputtering System With Planetary Rotation

In the evolving world of thin-film research and development, achieving consistent, high-quality coatings on complex substrates is paramount. Our Compact DC Sputtering System with Planetary Rotation is engineered to meet this exact need. This versatile, space-saving deposition tool combines the reliability of DC magnetron sputtering with the superior uniformity provided by a planetary rotation substrate holder, making it the ideal choice for laboratories, universities, and pilot production lines.

Discover our compact DC sputtering system with planetary rotation. Ideal for R&D, it ensures exceptional film uniformity on complex substrates. Learn about its features, benefits, and applications. 

Technology: Precision Meets Uniformity

This system is built around two key technological pillars:

1. DC Magnetron Sputtering: A proven and efficient physical vapor deposition (PVD) technique. It enables the deposition of a wide range of conductive materials (like Au, Ag, Pt, Cr, ITO) onto various substrates with excellent adhesion and film purity.

2. Planetary Rotation Mechanism: This is the system's standout feature. The substrate holder performs a complex, multi-axis "planetary" motion—where substrates rotate on their own axis while simultaneously revolving around a central point. This eliminates the "line-of-sight" limitations of standard sputtering, ensuring every surface of complex, 3D, or multiple small substrates receives an identical flux of coating material.

Features

• Unmatched Film Uniformity: The planetary rotation system guarantees thickness uniformity better than ±3% across the substrate batch, even for materials with non-uniform erosion targets. This is critical for reproducible R&D results and reliable small-batch production.

• Compact & Modular Design: Optimized for lab environments where space is at a premium. Its modular architecture allows for future upgrades, such as adding RF capability for dielectric materials or additional sputtering sources.

• Enhanced Coating Efficiency: Maximizes target material usage and coats multiple substrates or complex parts in a single run, improving throughput and reducing cost-per-sample.

• Versatile Substrate Compatibility: Handles a diverse array of substrates including silicon wafers, glass slides, ceramics, polymers, and even small mechanical parts.

• User-Friendly Operation: Features an intuitive touchscreen interface for process control, recipe management, and system monitoring. Safety interlocks and automated pump-down sequences ensure safe and repeatable operation.

• Robust Vacuum System: Equipped with a high-performance turbomolecular pump and backing pump to achieve a base pressure in the 10⁻⁶ mbar range, essential for creating clean, uncontaminated thin films.

Applications

This system is perfectly suited for applications demanding precise and uniform thin films:

• Advanced Materials Research: Developing novel coatings for optics, electronics, and energy applications.

• Microelectronics & Semiconductors: Depositing conductive layers for devices, sensors, and MEMS.

• Optical Coatings: Creating anti-reflective, reflective, or filter coatings on lenses and components.

• Wear & Corrosion Resistance: Applying protective metal or ceramic-like coatings on tools and components.

• Life Sciences: Coating bio-compatible layers on implants or creating substrates for biosensors.

• Pilot Production & Prototyping: Scaling up novel coating processes from concept to low-volume manufacturing.

Why Choose Our System?

Our Compact DC Sputtering System with Planetary Rotation offers a unique value proposition: it delivers the film quality and uniformity of larger industrial systems in a benchtop-friendly format. It bridges the gap between basic research and pre-commercialization, providing the data and samples needed to advance your projects with confidence.

Ideal for: Research Scientists, PhD Students, Process Development Engineers, and Innovative Startups.