CS200 Mass Flow Controller & Flowmeter

CS200 Mass Flow Controller & Flowmeter 

CS200 gas mass flow controller adopts advanced sensors and temperature compensation technology, so the product accuracy can reach within 1% of the set value, and the low temperature coefficient can ensure that the product can adapt to different ambient temperatures. At the same time, the product adopts high-speed control algorithms to make the response time of the entire flowmeter more colorful. Within the full range, the CS200C product can reach the set flow rate within 800ms at the fastest. The response time minimizes the system error generated during use, and the required flow rate is more accurate. 

Advantage 
• The constant power sensor principle adopted makes corresponding compensation when the temperature changes, fundamentally suppressing the zero drift phenomenon of the flowmeter and ensuring the linearity of the sensor. 
• CS200C products adopt special metal surface treatment technology, and all surface metal materials in contact with gas use 316LVV. The metal surface roughness of CS200C products can reach less than 10RA, and the metal surface roughness of CS200D products can reach 25RA. 
• CS200 products are manufactured in strict accordance with SEMI standards, and their sizes meet internationally accepted SEMI standards. 
• CS200 series products support ± 8 V ~ ± 16 V dual power supply, + 14 V ~ + 28 V single power supply; Digital, analog input and output. 
• The product supports RS485, DeviceNet, Profibus and EtherCAT communication methods. 
• Free client software with multi-gas and multi-range functions, automatic zeroing function, alarm function, soft start function, delay function and powerful functions.