Automatic Continuous Vacuum Sputtering Silver Mirror Line
The Automatic Continuous Vacuum Sputtering Silver Mirror Line is mainly used for multi-function metal film and anti-interference electromagnetic shielding film (EMI) for pressure-applied sheet, glass, ceramic, mobile phone case, computer, PC, PET, etc. , a reaction film, a composite film, a transparent conductive film (ITO), an anti-reflection film (AR), a reflection-increasing film by physical vapor deposition magnetron sputtering technology.
The continuous automatic production line ensures the consistency and stability of the coating film. The whole process has no waste gas and no waste water, and the quality meet the requirements of European environmental protection law.
Characteristics of the vacuum sputtering line:
● Horizontal vacuum chambers for simultaneous coating on both sides
● Efficient production, the fastest speed is 1 minute / glass sheet
● Modular design, easy for maintenance
● The coating process is mature and the yield is high.
● DC magnetron sputtering cathode can be selected according to customer requirements
● The vacuum system consists of mechanical pump, Roots pump, and diffusion pump (or molecular pump)
● Size of the vacuum coating line can be customized according to customer requirements
Techanical specifications:
Chamber type | Vertical and horizontal method of multi-chamber | |
Applied material | Glass and Wafer, other plastic, metal materials | |
Substrate size | Vertical type | According to the size of customer's glass sheet |
Horizontal type | According to the size of customer's glass sheet | |
Tact time | 120 sec or less (Static method) 90 sec or less (Dynamic method) | |
Coating source | Sputter source | Rotary cathode, Planar cathode |
Coating material | Metal material | Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material |
Reactive material | TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide material | |
Power supply | DC, Pulse DC, MF | |
Thickness uniformity | ±10% or less (Static film) ±5% or less (Moving film) | |
Measuring instrument | Sheet resistance, optic (Transmittance, reflectance, color-difference meter), | |
plasma emission monitor, RGA | ||
Household appliances field | Decorative coating on household products and exterior of mobile devices | |
Energy field | Silver & aluminum mirror manufacturing industry |
For more details please feel free to contact us.