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Vacuum Magnetron Sputtering Machine

Physical vapor deposition (PVD) is a technology where a material is evaporated and condensed to form a thin film coating over an object (substrate).
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Vacuum Magnetron Sputtering Coating Machine
Physical vapor deposition (PVD) is a technology where a material is evaporated and condensed to form a thin film coating over an object (substrate). With a wide range of coating materials and thicknesses, PVD can be customized to applications and the coatings can be optimized for various characteristics, such as decorative, optical, electrical, and mechanical properties.
Magnetron sputtering is one of PVD technique, where ionized particle bombard target surface, when energy is high enough, the target atom will be sputtered out. Magnetron sputtering has following advantages:
PVD is used for depositing decorative films on watch casings, jewelry and furniture, as well as for functional films for moulds and dies, cutting tools, and low-friction machine parts. The process delivers a high pass rate and good quality.
♥ No environmentally damaging materials and emissions, no toxic reaction products
♥ Great variety of coatings can be produced, most substrate can be coated
♥ High wear resistance, Low friction coefficient
♥ Coating temperature below the final heat treatment temperature of most steels
♥ Small, precisely reproducible coating thickness (accurate surface replication, true to size)
General Information:
High quality sputtering coating unit
Easy operation and maintenance
Coatings on plastics, glass, metal etc
Techanical Specifications:
PVD(physical vapor deposition) Magnetron sputtering machine
(The configurations are custom made to meet each customer's needs)
Available coatings
(could be changed according to each machine)
Metal film coatings: Titanium, Chrome, Stainless steel, Aluminum, Silver, Copper, Nikel, atc
Alloy film coatings: TiN, SiO2, TiO, etc
Decorative applications Functional applications
1. Plastic tablewares with food grade silvering coatings
2. Mirror making
3. High quality plastic metallizing;
4. Car parts coating
5. Cosmetic caps coating
Thin film coating onto other items.
1. ITO conductive glass coatings,
2. Low-E glass and sun reflecting glass coatings;
3. Tools coating;
4. Solar heating collecting thin film coating;
et cetera.
Model Number SP-600 SP-900 SP-1000 SP-1200 SP-1400 SP-1800 SP-8000
Dimension of vacuum chamber(diameter*height) 600*700mm 900*1000 1000*1100 1200*1400 1400*1600 1800*2000 Continuous line
Material of vacuum chamber Carbon steel, SUS304 or SUS316L
Quantity of sputtering cathodes 1 sets,
DC sputtering cathodes(cylindrical / planar)
MF(Medium frequency) sputtering cathodes (cylindrical / planar)
Quantity of sputtering cathode is open.
Pumping system molecular pump or diffusion pump+mechanical pump molecular pump or diffusion pump+mechanical pumps, booster pump
Pumping Time From atmosphere to 5.0*10-2Pa  less than 8 minutes
Gas distribution System with Mass Flow Controllers 2 sets
Vacuum Limit 5.0*10-4 Pa
Working temperature Room temperature
As requested( for for continuous model)
Working mode Industrial full touched PLC screen
No programming knowledge is required for process control
Total Power 40-100kW 70-1000kW
Footprint 2*2 meters 2*3 meters 3*3 meters 3*3 meters 3*4 meters 4*5 meters Depends on needs
These units you can custom made 1. Size of vacuum chamber
2. Quantity of sputtering cathodes
3. Configurations of pumps
4. Gas distribution system
Optional instruments 1. Coatings thickness monitor
2. Leakage detector
3. Arc ion deposition system(not for continuous model)
4. Evaporation system(not for continuous model)
Mirror making
Food grade coatings on disposable cutleries
Car headlamps and reflectors
Decorative coatings on steel parts
Other plastic parts
a Electronic components conductive coatings
b ITO conductive glass
c Optical lens
d Automotive industry
e Glass industry
f Roll to roll reflective thin films
g Decorative colors on metal susbtrates
h Molds and drills
i Hard coatings
j Solar industry
Necessary pretreatment machines:
Base varnish and topcoat applying unit, Drying oven for plastic substrates
Washing and dry machines for glass substrates
Ultrasonic washing machine, pure water machine, drying oven, chiller for metal substrates
Our serves:
We are custom manufacturer of high quality PVD vacuum coating machines. We also provide technical troubleshooting service and modification solutions for old machines.
General Process:
♥ Ar gas which is activated in plasma forms Ar ions.
♥ The Ar ions sputter out metal atoms from the target.
♥ Magnetic field introduces the Ar ions around the substrate.
♥ Apply negative voltage on the substrate to attract Ar ions that induce active energy to the metal atoms depositing on the substrate.
♥ Solid metal films are formed on the substrate
For more details please inquiry us.
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Continuously Magnetron Sputtering Line:



Continuously Magnetron Sputtering Line:



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